Apr 23, 2025  
2024-2025 University Catalog 
    
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2024-2025 University Catalog

ECE 52600 - Fundamentals Of MEMS And Micro-Integrated Systems

Credit Hours: 3.00.  (BME 58100) Key topics in micro-electro-mechanical systems (MEMS) and biological micro-integrated systems; properties of materials for MEMS; microelectronic process modules for design and fabrication. Students will prepare a project report on the design of a biomedical MEMS-based micro-integrated system. Offered in alternate years. Permission of department required. Typically offered Fall.Credits: 3.00